Model the Analog Devices acceleration sensor as a proof mass (m) attached to a

cantilever spring. The formula for the spring constant of the cantilever k = Ewt3 / 4l3.

(a) Derive the scaling laws for static displacement under acceleration a.

(b) Then derive the scaling laws for the resonant frequency of the acceleration sensor.

(c) Discuss the advantages and disadvantages for scaling down the size of the sensor.